Inquivix Technologies dissolved hydrogen water generators produce high-purity hydrogen through PEM electrolysis and dissolve it into deionized water using a PFA hollow fiber membrane contactor. The result is a stable, precisely controlled dissolved hydrogen concentration delivered directly to semiconductor wet cleaning processes at the point of use.
The Inquivix Technologies hydrogen water generator combines on-site PEM hydrogen generation with PFA membrane dissolution in one engineered platform, eliminating compressed hydrogen cylinders, external gas plumbing, and downstream concentration drift.
The Inquivix Technologies hydrogen water generator simultaneously generates hydrogen gas and dissolves it into ultrapure water in a single integrated system. Hydrogen is produced by a PEM (Proton Exchange Membrane) electrolysis cell, which generates 99.999% purity hydrogen gas from deionized water without external gas supply. The hydrogen is injected into the DI water stream through a PFA hollow fiber membrane contactor, where it dissolves under controlled pressure and flow conditions to achieve the target concentration.
Each dissolved hydrogen water system integrates with existing ultrapure water delivery infrastructure, eliminating the need for compressed hydrogen gas cylinders, external gas supply plumbing, and associated gas storage safety systems. A PLC-driven control system with HMI touch panel provides real-time dissolved hydrogen concentration monitoring, DI water flow measurement, and closed-loop cascade control of the hydrogen injection rate.
The system is designed for indoor installation in cleanroom utility corridors and clean plant rooms. The hydrogen water generator supplies hydrogen-treated ultrapure water at stable, controlled pressure and flow rates to downstream wet process tools.
Configurable output platforms, from compact wet bench supplies through high-throughput fab-floor systems. Dimensions, utility inputs, and detailed configuration options are provided during the engineering consultation.
Dissolved hydrogen water systems are available in multiple configurations to match specific process throughput and facility requirements. Compact and large-format system platforms are available. Contact Inquivix Technologies for detailed specifications, system sizing, and utility requirements.
Each Inquivix dissolved hydrogen water generator is built on a deliberate set of engineering choices, from on-site PEM hydrogen generation, through PFA membrane dissolution, to closed-loop cascade control and SECS/GEM fab integration.
The hydrogen generator uses a Proton Exchange Membrane electrolysis cell to produce 99.999% purity hydrogen on-site from deionized water. The PEM cell reuses process water rather than discarding it, reducing DI water consumption while maintaining consistent hydrogen purity without external contamination sources.
The dissolution module uses a PFA (perfluoroalkoxy) hollow fiber membrane contactor that is highly resistant to chemical degradation. Hydrogen gas is injected along the membrane fiber surfaces and dissolves into the DI water stream flowing through the contactor. PFA construction ensures long operational life and consistent dissolution efficiency throughout the contactor's service period.
A PLC-based control system provides closed-loop cascade control of the dissolved hydrogen concentration. The built-in DI water flow sensor measures real-time water consumption, and the hydrogen line flow controller adjusts the hydrogen injection rate to maintain the target dissolved concentration across varying process demand. The HMI touch panel displays real-time concentration, flow rate, pressure, and system status.
Every dissolved hydrogen water system includes hydrogen gas leak detection sensors and water leakage sensors with automatic shutdown interlocks. When a leak is detected, the system initiates an automatic emergency shutdown sequence, the PEM cell stops hydrogen production entirely (not just injection) and the system enters a safe idle state. Dry contact output signals communicate system status and alarm conditions to external monitoring systems.
All Inquivix Technologies hydrogen water generators support SEMI Equipment Communications Standard (SECS) and Generic Equipment Model (GEM) protocols. This enables automated equipment status monitoring, alarm management, process data collection, and remote control through the fab's existing Manufacturing Execution System (MES). SECS/GEM integration eliminates the need for manual monitoring and supports the automated reporting requirements of high-volume semiconductor production environments.
All wetted components in the fluid path are constructed from ultrapure water-compatible materials: electropolished stainless steel, PTFE, PFA, and PVDF. The system maintains water resistivity above 18.2 MΩ·cm and total organic carbon (TOC) levels below 5 ppb at the point of use, preserving the integrity of the fab's UPW delivery infrastructure.
From front-end wafer cleaning to advanced packaging and display manufacturing, dissolved hydrogen water is specified where surface condition, particle removal, and metallic contamination control directly drive yield.
Dissolved hydrogen water is used across semiconductor fabs to reduce metallic contamination on wafer surfaces and improve particle removal efficiency during wet cleaning sequences. Hydrogen-treated DI water enhances the removal of sub-micron particles compared to conventional DI water rinse alone, particularly in megasonic-assisted cleaning processes on 200mm and 300mm wafer manufacturing lines.
Dissolved hydrogen in ultrapure water passivates active silicon surfaces during inter-step transfers and queue time management in semiconductor wet processing lines. This hydrogen-terminated surface prevents recontamination and native oxide regrowth between cleaning steps, improving process consistency and yield stability across sequential wet bench operations.
Hydrogen water rinse steps are incorporated into pre-diffusion and pre-oxidation cleaning sequences where wafer surface condition directly impacts subsequent thermal processing results. The controlled dissolved hydrogen concentration provides consistent and repeatable surface preparation across production lots.
Beyond front-end wafer fabrication, Inquivix Technologies dissolved hydrogen water systems serve advanced packaging facilities (including HBM and chiplet-based packaging lines), flat panel display glass cleaning, and thin film transistor (TFT) processing environments where metallic contamination control and surface preparation requirements are critical.
Inquivix Technologies provides complete process integration engineering for every dissolved hydrogen water system deployment, so the hardware shipped to your fab is already shaped to your control system, your wet bench, and your EHS framework.
Inquivix Technologies provides complete process integration engineering for every dissolved hydrogen water system deployment. This includes P&ID review, utility requirement planning, control interface specification for connection to existing wet bench tools and process control systems, and safety interlock design to comply with site-specific EHS requirements.
Each hydrogen water generator is configured to match the specific electrical, mechanical, and process control infrastructure of your facility before procurement, reducing integration risk, minimizing commissioning time, and ensuring the system performs at specification from the first day of operation.
Whether you are specifying a dissolved hydrogen water system for a new fab build, retrofitting hydrogen water capability into an existing wet process line, or evaluating hydrogen water generators for your equipment platform, the Inquivix Technologies engineering team is ready to review your process requirements and configure the right system for your application.