Inquivix Technologies hydrogen gas generators produce semiconductor-grade hydrogen at 99.999% purity (5N) using solid polymer electrolyte (PEM) cell technology. These on-site generation systems replace traditional compressed hydrogen cylinder delivery with a safer, more consistent, and more cost-effective hydrogen gas supply system for semiconductor fab process applications.
The Inquivix Technologies hydrogen gas generator uses a Proton Exchange Membrane (PEM) electrolysis cell to produce high-purity hydrogen gas on-site from deionized water. PEM cell technology generates hydrogen without external gas feedstock, chemical reforming, or bulk gas storage, delivering a continuous, on-demand supply of 99.999% purity hydrogen at stable pressure and flow directly to downstream semiconductor process equipment.
On-site hydrogen gas generation eliminates the logistics, scheduling, safety overhead, and recurring costs associated with compressed hydrogen cylinder delivery. There is no cylinder changeover downtime, no residual gas waste, and no high-pressure cylinder storage requirement within the semiconductor fab environment.
Headline output, certification, and integration parameters for the Inquivix Technologies hydrogen gas generator platform. Detailed mechanical, electrical, and utility specifications are reserved for system proposals.
Four core engineering characteristics define every Inquivix Technologies hydrogen gas generator, from the PEM electrochemical core, through the layered safety architecture, to direct integration with the fab's MES via SECS/GEM.
The PEM electrolysis cell generates hydrogen from deionized water through an electrochemical process, no combustion, no chemical feedstock, no byproduct contamination. The hydrogen output maintains 99.999% purity consistently over the full operating life of the generator, with no degradation in gas quality between maintenance intervals.
Every Inquivix Technologies hydrogen gas generator includes multiple independent safety systems: hydrogen leak detection with automatic emergency shutdown, continuous internal pressure monitoring, ventilation interlock confirming adequate exhaust airflow before operation, and system-level fault detection with alarm output.
All hydrogen gas generators support SEMI SECS/GEM communication protocols for automated integration with semiconductor fab Manufacturing Execution Systems (MES). Equipment status, process variables, alarm conditions, and operational data are communicated in real time to the factory control system.
Inquivix Technologies hydrogen gas generators carry both CE marking for European regulatory compliance and UL listing for North American safety standards. Dual certification enables deployment across semiconductor manufacturing facilities worldwide without additional safety engineering or regional compliance modifications.
Hydrogen gas generators supply hydrogen to four core semiconductor process categories. Each application benefits from the continuous, batch-free purity of on-site PEM-generated hydrogen.
High-purity hydrogen gas is used in forming gas mixtures (typically H₂/N₂) for annealing processes that reduce interface trap densities and improve electrical characteristics of semiconductor gate oxide and passivation layers. On-site hydrogen generation provides a continuous supply at the exact purity required, eliminating the batch-dependent quality variation associated with cylinder delivery.
Hydrogen serves as a carrier gas and reducing agent in chemical vapor deposition (CVD) and physical vapor deposition (PVD) processes for thin film growth in semiconductor manufacturing. Applications include epitaxial silicon deposition, metal-organic CVD (MOCVD) for compound semiconductors, and metallization processes requiring a reducing atmosphere.
Semiconductor processes requiring ammonia-diluted hydrogen atmospheres for nitride formation and surface treatment benefit from on-site hydrogen generation that delivers consistent 99.999% purity gas, avoiding the flow interruptions and purity variability inherent in compressed cylinder supply.
Any semiconductor or advanced manufacturing process requiring a controlled reducing atmosphere, including brazing, sintering, and thermal processing of semiconductor components, can be supplied with on-site generated high-purity hydrogen gas from Inquivix Technologies hydrogen gas generators.
Inquivix Technologies provides process integration engineering for every hydrogen gas generator deployment, from utility planning through SECS/GEM commissioning. Five deliverables ship with every system.
The Inquivix Technologies catalog spans hydrogen and ozone systems in both water and gas mediums, each platform engineered for direct integration into semiconductor fab process environments.
Whether you are replacing compressed hydrogen cylinder supply, adding on-site hydrogen generation to a new fab build, or specifying hydrogen gas generators for your equipment platform, the Inquivix Technologies engineering team will evaluate your process requirements and configure the right system for your facility.
