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Exclusive Distribution and Technical Representation
Inquivix Technologies negotiates and manages exclusive representation agreements for foreign suppliers of semiconductor process equipment and materials entering the Korean market.
Semiconductor Clean-Process Technology
Hydrogen and Ozone
Systems Engineered for
Semiconductor Purity Inquivix Technologies delivers high-purity hydrogen water generators, hydrogen gas generators, ozone water systems, and ozone gas generators to semiconductor fabs, equipment OEMs, and process integrators worldwide. Based in Incheon, Republic of Korea, Inquivix Technologies serves as the trusted gateway for global semiconductor technology companies entering the Korean semiconductor ecosystem.
99.999%
Hydrogen Purity (5N Grade)
≤ 300 g/Nm³
Ozone Concentration
20–100 LPM
UPW Flow Range
Solutions
Hydrogen and Ozone Generation Systems for Advanced Semiconductor Manufacturing
Every semiconductor fab depends on precise contamination control to protect wafer yield and device performance. As process nodes shrink below 5nm and as advanced packaging technologies such as HBM and chiplet architectures drive tighter contamination specifications, the role of functional water and gas systems in wet processing becomes increasingly critical. Inquivix Technologies supplies hydrogen and ozone systems purpose-built for the purity, stability, and integration requirements of modern semiconductor wet processing.
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Dissolved Hydrogen Wet-Process Systems
Our on-site PEM electrolysis platform generates 5N-grade hydrogen and dissolves it into ultrapure water via PFA hollow-fiber membrane contactors, delivering 1.0–2.0 ppm stable dissolved hydrogen directly to wet bench tools. Eliminates external hydrogen cylinders and integrates with fab UPW distribution via SECS/GEM protocol.
1.0 – 2.0 ppm H₂20 – 100 LPMSECS/GEMPEM Electrolysis
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Hydrogen Gas Generators
Our on-site PEM hydrogen gas generators produce semiconductor-grade hydrogen at 99.999% purity (5N grade) for annealing furnaces, reduction atmospheres, forming gas applications, and epitaxial growth, eliminating hazardous compressed gas cylinder logistics from the fab.
99.999% H₂ Purity1 – 4 Nl/minCE / UL CertifiedAuto-Shutdown
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Ozone Water Systems
Our ozone water systems dissolve high-concentration ozone gas into ultrapure water for semiconductor wafer cleaning and surface oxidation, replacing hazardous SPM chemistries with a chemical-free process. Built-in UV destruction safely decomposes residual ozone before exhaust.
10 – 100 ppm O₃ in DI WaterHigh Flow RateUV DestructionHMI Touch Panel
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Ozone Gas Generators
Our ozone gas generators deliver high-concentration ozone at up to 300 g O₃/Nm³ for semiconductor dry-process applications including wafer surface oxidation, ALD/CVD precursor delivery, and process chamber cleaning, using a proprietary cell design certified to CE and UL standards.
≤ 300 g O₃/Nm³5 – 40 slm O₂Proprietary Cell DesignCE / UL Certified
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Korea Market Entry
Your Gateway to Korea's Semiconductor Industry
Korea is the global epicenter of semiconductor manufacturing and the largest concentration of advanced memory and logic fabrication capacity in the world. Home to Samsung Electronics, SK Hynix, and a rapidly expanding network of advanced fabs along the K-Semiconductor Belt, the Korean semiconductor ecosystem represents one of the largest and most technically demanding markets for semiconductor equipment and process technology. With over ₩700 trillion (approximately USD $475 billion) in planned investments across DRAM, NAND, HBM (High Bandwidth Memory), logic semiconductors, and advanced packaging technologies, Korea is strengthening its position as the primary global hub for next-generation chip manufacturing through 2030 and beyond.
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Full Localization and Fab Qualification Support
From bilingual technical documentation and Korean regulatory certification to on-site system installation and fab-level performance validation, Inquivix Technologies manages the complete localization and qualification process.
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Long-Term Market Growth and After-Sales Support
Market entry is not a one-time event. After the first system is qualified and deployed, Inquivix Technologies drives pipeline development through ongoing account management, technical support, spare parts provisioning, and expansion into adjacent fab sites and process applications.
> ₩700T
Planned K-Semiconductor Belt Investment (USD ~$475B)
> 60%
Global Memory Semiconductor Market Share from Korea
20+
New Fabs and R&D Centers Under Construction in Korea
100%
Bilingual Engineering and Business Support
Why Inquivix
A Semiconductor Technology Partner, Not a Trading Company
Inquivix Technologies operates as a technical partner and system integrator for semiconductor clean-process technologies. We combine deep domain knowledge in hydrogen and ozone chemistry, ultrapure water systems, and wet process integration with direct access to Korea's semiconductor manufacturing ecosystem and a global network of qualified technology suppliers.
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Semiconductor-Specific Expertise
Inquivix Technologies specializes exclusively in clean-process technologies for semiconductor manufacturing: dissolved hydrogen systems, hydrogen gas generators, ozone water systems, ozone gas generators, ultrapure water (UPW) wet process integration, and contamination control.
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Korea Semiconductor Ecosystem Access
Headquartered in Incheon, Republic of Korea, Inquivix Technologies maintains direct relationships with major Korean semiconductor manufacturers, equipment integrators, and process engineering teams across the K-Semiconductor Belt.
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Full-Cycle Technical Support
From the initial technical inquiry through system specification, proposal development, installation coordination, commissioning, and ongoing after-sales maintenance, Inquivix Technologies manages every stage of the engagement. We own the technical relationship, provide bilingual engineering support, coordinate logistics and compliance, and ensure that every system performs at or above the specifications agreed upon during qualification.
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Semiconductor Wafer Cleaning
Surface Oxidation and Passivation
Photoresist Stripping and Organic Removal
Reducing Atmospheres and Annealing
Display and Photovoltaic Manufacturing
Advanced Packaging & Chiplet Process Cleaning
Technical Standards
Built to Global Semiconductor Standards
All Inquivix Technologies hydrogen and ozone systems are designed, manufactured, and tested to meet the most stringent quality and safety standards in the semiconductor industry.
SECS/GEM Communication
SEMI E30 and E37 compliant equipment communication protocol support for integration with semiconductor manufacturing execution systems and factory automation networks.
CE and UL Certification
Product safety certification meeting European and North American regulatory requirements for electrical systems, pressure vessels, and industrial gas generation equipment.
Ultrapure Water Compatibility
All wetted materials constructed from UPW-compatible components including electropolished stainless steel, PTFE, PFA, and PVDF, maintaining resistivity above 18.2 MΩ·cm and TOC below 5 ppb at point of use.
Process Integration Engineering
P&ID review, utility requirement planning, control interface specification, and safety interlock design to ensure every system is properly matched to your facility before procurement.
How We Work
From Inquiry to Integration
Whether you are a semiconductor fab evaluating a hydrogen water generator for wafer cleaning, an equipment OEM looking for an ozone gas generator for tool integration, or an international technology company seeking Korean semiconductor market representation, our engagement process is structured for technical rigor and commercial clarity.
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Technical Consultation
We start with your process requirements: flow rates, dissolved hydrogen or ozone concentrations, integration constraints, electrical specifications, safety requirements, and compliance needs.
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System Specification
Our engineering team configures the hydrogen or ozone system to match your exact process environment, including P&ID review, utility requirements, control interface specifications, and safety interlocks.
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Proposal and Qualification
Inquivix Technologies delivers a detailed proposal with itemized system specifications, application-specific feature documentation, and technical support materials to support your internal procurement and qualification process.
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Delivery and Ongoing Support
From manufacturing coordination and international logistics to on-site installation support, system commissioning, and ongoing preventive maintenance, Inquivix Technologies manages the complete delivery lifecycle.
Contact
Ready to Discuss Your Process Requirements?
Whether you need a hydrogen water generator for semiconductor wafer cleaning, an ozone gas generator for your oxidation process, or a trusted partner for entering the Korean semiconductor market, our engineering team is ready to help you evaluate the right solution for your facility.