Hydrogen and Ozone Systems
We supply dissolved hydrogen water generators, hydrogen gas generators, ozone water systems, and ozone gas generators that meet the purity, stability, and integration requirements of advanced semiconductor wet processing. Every system supports SECS/GEM communication protocols, UPW-compatible materials, and the safety certifications (CE, UL) required for semiconductor fab deployment.
Our systems serve wafer cleaning, surface passivation, photoresist stripping, controlled oxidation, carrier gas supply, and reducing atmosphere applications across 200mm and 300mm manufacturing lines.
- SECS/GEM
- UPW-compatible
- CE / UL
- 200mm & 300mm


