Hydrogen and Ozone
Systems Engineered for
Semiconductor Purity
Inquivix Technologies delivers high-purity hydrogen water generators, hydrogen gas generators, ozone water systems, and ozone gas generators to semiconductor fabs, equipment OEMs, and process integrators worldwide. Based in Incheon, Republic of Korea, Inquivix Technologies serves as the trusted gateway for global semiconductor technology companies entering the Korean semiconductor ecosystem.
99.999%
Hydrogen Purity (5N Grade)
≤ 300 g/Nm³
Ozone Concentration
20–100 LPM
UPW Flow Range
Hydrogen and Ozone Generation Systems for Advanced Semiconductor Manufacturing
Every semiconductor fab depends on precise contamination control to protect wafer yield and device performance. As process nodes shrink below 5nm and as advanced packaging technologies such as HBM and chiplet architectures drive tighter contamination specifications, the role of functional water and gas systems in wet processing becomes increasingly critical. Inquivix Technologies supplies hydrogen and ozone systems purpose-built for the purity, stability, and integration requirements of modern semiconductor wet processing.
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Dissolved Hydrogen Water Systems
Our hydrogen water generators dissolve ultra-pure hydrogen into deionized water through PEM e…
Hydrogen Gas Generators
Our hydrogen gas generators produce semiconductor-grade hydrogen at 99.999% purity (5…
Ozone Water Systems
Our ozone water systems dissolve high-concentration ozone gas into ultrapure water …
Ozone Gas Generators
Our ozone gas generators deliver high-concentration ozone at up to 300 g O₃/Nm³ in the gas pha…
Your Gateway to Korea's Semiconductor Industry
Korea is the global epicenter of semiconductor manufacturing and the largest concentration of advanced memory and logic fabrication capacity in the world. Home to Samsung Electronics, SK Hynix, and a rapidly expanding network of advanced fabs along the K-Semiconductor Belt, the Korean semiconductor ecosystem represents one of the largest and most technically demanding markets for semiconductor equipment and process technology. With over ₩600 trillion (approximately USD $450 billion) in planned investments across DRAM, NAND, HBM (High Bandwidth Memory), logic semiconductors, and advanced packaging technologies, Korea is strengthening its position as the primary global hub for next-generation chip manufacturing through 2030 and beyond.
Discover MoreExclusive Distribution and Technical Representation
Inquivix Technologies negotiates and manages exclusive representation agreements for foreign suppliers of semiconductor process equipment and materials entering the Korean market.
Full Localization and Fab Qualification Support
From bilingual technical documentation and Korean regulatory certification to on-site system installation and fab-level performance validation, Inquivix Technologies manages the complete localization and qualification process.
Long-Term Market Growth and After-Sales Support
Market entry is not a one-time event. After the first system is qualified and deployed, Inquivix Technologies drives pipeline development through ongoing account management, technical support, spare parts provisioning, and expansion into adjacent fab sites and process applications.
Planned K-Semiconductor Belt Investment (USD ~$450B)
Global Memory Semiconductor Market Share from Korea
New Fabs and R&D Centers Under Construction in Korea
Bilingual Engineering and Business Support
A Semiconductor Technology Partner, Not a Trading Company
Inquivix Technologies operates as a technical partner and system integrator for semiconductor clean-process technologies. We combine deep domain knowledge in hydrogen and ozone chemistry, ultrapure water systems, and wet process integration with direct access to Korea's semiconductor manufacturing ecosystem and a global network of qualified technology suppliers.
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Semiconductor-Specific Expertise
Inquivix Technologies specializes exclusively in clean-process technologies for semiconductor manufacturing: dissolved hydrogen systems, hydrogen gas generators, ozone water systems, ozone gas generators, ultrapure water treatment, and contamination control.
Korea Semiconductor Ecosystem Access
Headquartered in Incheon, Republic of Korea, Inquivix Technologies maintains direct relationships with major Korean semiconductor manufacturers, equipment integrators, and process engineering teams across the K-Semiconductor Belt.
Bilingual Engineering and Business Operations
All commercial, technical, and after-sales communications are conducted in both Korean and English by our in-house team, ensuring seamless collaboration between international technology suppliers and Korean semiconductor buyers.
Semiconductor Wafer Cleaning
Surface Oxidation and Passivation
Photoresist Stripping and Organic Removal
Reducing Atmospheres and Annealing
Display and Photovoltaic Manufacturing
Medical and Sterilization Applications
Built to Global Semiconductor Standards
All Inquivix Technologies hydrogen and ozone systems are designed, manufactured, and tested to meet the most stringent quality and safety standards in the semiconductor industry.
SEMI S2/S8 Safety Guidelines
Environmental, health, and safety compliance for semiconductor manufacturing equipment, covering electrical safety, gas handling, and chemical exposure standards.
CE and UL Certification
Product safety certification meeting European and North American regulatory requirements for electrical systems, pressure vessels, and industrial gas generation equipment.
SECS/GEM Communication
SEMI E30 and E37 compliant equipment communication protocol support for integration with semiconductor manufacturing execution systems and factory automation networks.
ISO 9001 Quality Management
Full quality management system certification ensuring consistent manufacturing processes, traceability, and continuous improvement across all product lines and support operations.
From Inquiry to Integration
Whether you are a semiconductor fab evaluating a hydrogen water generator for wafer cleaning, an equipment OEM looking for an ozone gas generator for tool integration, or an international technology company seeking Korean semiconductor market representation, our engagement process is structured for technical rigor and commercial clarity.
Technical Consultation
We start with your process requirements: flow rates, dissolved hydrogen or ozone concentrations, integration constraints, electrical specifications, safety requirements, and compliance needs.
System Specification
Our engineering team configures the hydrogen or ozone system to match your exact process environment, including P&ID review, utility requirements, control interface specifications, and safety interlocks.
Proposal and Qualification
Inquivix Technologies delivers a detailed proposal with itemized system specifications, application-specific feature documentation, and technical support materials to support your internal procurement and qualification process.
Delivery and Ongoing Support
From manufacturing coordination and international logistics to on-site installation support, system commissioning, and ongoing preventive maintenance, Inquivix Technologies manages the complete delivery lifecycle.
Ready to Discuss Your Process Requirements?
From bilingual technical documentation and Korean regulatory certification to on-site system installation and fab-level performance validation, Inquivix Technologies manages the complete localization and qualification process. Our bilingual engineering team ensures every hydrogen generator, ozone system, or process tool meets Korean compliance standards and fab-specific performance requirements before it reaches the cleanroom floor. We handle import logistics, certification coordination, and technical demonstration support so your team can focus on the technology.