Hydrogen and Ozone
Systems Engineered for
Semiconductor Purity
Inquivix Technologies delivers high-purity hydrogen water generators, hydrogen gas generators, ozone water systems, and ozone gas generators to semiconductor fabs, equipment OEMs, and process integrators worldwide. Based in Incheon, Republic of Korea, Inquivix Technologies serves as the trusted gateway for global semiconductor technology companies entering the Korean semiconductor ecosystem.
99.999%
Hydrogen Purity (5N Grade)
≤ 300 g/Nm³
Ozone Concentration
20–100 LPM
UPW Flow Range
Hydrogen and Ozone Generation Systems for Advanced Semiconductor Manufacturing
Every semiconductor fab depends on precise contamination control to protect wafer yield and device performance. As process nodes shrink below 5nm and as advanced packaging technologies such as HBM and chiplet architectures drive tighter contamination specifications, the role of functional water and gas systems in wet processing becomes increasingly critical. Inquivix Technologies supplies hydrogen and ozone systems purpose-built for the purity, stability, and integration requirements of modern semiconductor wet processing.
From dissolved hydrogen injection into ultrapure water for particle reduction and surface passivation, to high-concentration ozone gas generation for photoresist stripping and silicon oxide growth, each system is designed to meet the exacting demands of semiconductor wafer cleaning, surface treatment, and organic contamination removal at the most advanced process nodes in production today. Our hydrogen water generators and ozone gas generators are deployed across semiconductor wafer fabrication, advanced packaging, display, photovoltaic, and precision industrial manufacturing facilities globally. Every system is engineered for direct integration with existing fab infrastructure, including UPW distribution networks, wet bench tools, and automated process control systems.
Dissolved Hydrogen Water Systems
Our hydrogen water generators dissolve ultra-pure hydrogen into deionized water through PEM electrolysis and hollow fiber membrane injection, producing stable dissolved hydrogen concentrations for semic ...
Hydrogen Gas Generators
Our hydrogen gas generators produce semiconductor-grade hydrogen at 99.999% purity (5N) using solid polymer electrolyte (PEM) cell technology. These on-site hydrogen gas generation systems replace tra ...
Ozone Water Systems
Our ozone water systems dissolve high-concentration ozone gas into ultrapure water to produce functional ozonated water for semiconductor wafer cleaning and surface treatment. These ozone water generators re ...
Ozone Gas Generators
Our ozone gas generators deliver high-concentration ozone at up to 300 g O₃/Nm³ in the gas phase, with adjustable O₂ flow rates from 5 to 40 slm for precise process control. Engineered with a patented internal cell de ...
Your Gateway to Korea's Semiconductor Industry
Korea is the global epicenter of semiconductor manufacturing and the largest concentration of advanced memory and logic fabrication capacity in the world. Home to Samsung Electronics, SK Hynix, and a rapidly expanding network of advanced fabs along the K-Semiconductor Belt, the Korean semiconductor ecosystem represents one of the largest and most technically demanding markets for semiconductor equipment and process technology. With over ₩600 trillion (approximately USD $450 billion) in planned investments across DRAM, NAND, HBM (High Bandwidth Memory), logic semiconductors, and advanced packaging technologies, Korea is strengthening its position as the primary global hub for next-generation chip manufacturing through 2030 and beyond.
For international semiconductor equipment and process technology companies, entering the Korean semiconductor market requires more than a translated datasheet. It requires local technical credibility, regulatory compliance expertise, procurement fluency, and direct relationships with fab engineering and procurement teams at the largest chipmakers in the world. Inquivix Technologies provides that access — serving as the single point of entry for companies that want to establish a credible, compliant, and commercially sustainable presence in the Korean semiconductor ecosystem.
Exclusive Distribution and Technical Representation
Inquivix Technologies negotiates and manages exclusive representation agreements for foreign suppliers of semiconductor process equipment and materials entering the Korean market. Your technology gets a dedicated Korean sales arm with protected market access and direct relationships with top-tier semiconductor fabs, research institutions, and equipment integrators across the K-Semiconductor Belt. We represent your brand, protect your commercial positioning, and build lasting relationships within Korea's semiconductor procurement ecosystem.
Full Localization and Fab Qualification Support
From bilingual technical documentation and Korean regulatory certification to on-site system installation and fab-level performance validation, Inquivix Technologies manages the complete localization and qualification process. Our bilingual engineering team ensures every hydrogen generator, ozone system, or process tool meets Korean compliance standards and fab-specific performance requirements before it reaches the cleanroom floor. We handle import logistics, certification coordination, and technical demonstration support so your team can focus on the technology.
Long-Term Market Growth and After-Sales Support
Market entry is not a one-time event. After the first system is qualified and deployed, Inquivix Technologies drives pipeline development through ongoing account management, technical support, spare parts provisioning, and expansion into adjacent fab sites and process applications. Our goal is to build a sustainable commercial footprint in the Korean semiconductor market that delivers recurring revenue and long-term partnership value — not one-off transactions.
> ₩600T
Planned K-Semiconductor Belt Investment (USD ~$450B)
> 60%
Global Memory Semiconductor Market Share from Korea
20+
New Fabs and R&D Centers Under Construction in Korea
100%
Bilingual Engineering and Business Support
A Semiconductor Technology Partner, Not a Trading Company
Inquivix Technologies operates as a technical partner and system integrator for semiconductor clean-process technologies. We combine deep domain knowledge in hydrogen and ozone chemistry, ultrapure water systems, and wet process integration with direct access to Korea's semiconductor manufacturing ecosystem and a global network of qualified technology suppliers. Unlike general industrial equipment distributors, Inquivix Technologies focuses exclusively on the semiconductor and advanced manufacturing space. We evaluate every opportunity through the lens of technical feasibility, process compatibility, and long-term commercial viability — ensuring that the systems we recommend are the right fit for your specific application, not just the closest available product.
Semiconductor-Specific Expertise
Inquivix Technologies specializes exclusively in clean-process technologies for semiconductor manufacturing: dissolved hydrogen systems, hydrogen gas generators, ozone water systems, ozone gas generators, ultrapure water treatment, and contamination control. Every system we supply is evaluated against fab-level performance requirements — not general industrial specifications. Our technical team understands the hydrogen and ozone chemistry, the process integration challenges, and the qualification standards that matter to semiconductor process engineers and equipment managers.
Korea Semiconductor Ecosystem Access
Headquartered in Incheon, Republic of Korea, and connected across the K-Semiconductor Belt, Inquivix Technologies maintains direct relationships with Korean semiconductor fabs, research centers, and equipment integrators. We understand Korean procurement culture, regulatory compliance, and the technical communication standards that global semiconductor companies often struggle to navigate alone. This local access is the competitive advantage that our partners leverage to build a credible, compliant, and profitable presence in the world's most advanced semiconductor manufacturing market.
Full-Cycle Technical Support
From the initial technical inquiry through system specification, proposal development, installation coordination, commissioning, and ongoing after-sales maintenance, Inquivix Technologies manages every stage of the engagement. We do not pass orders between buyer and manufacturer. We own the technical relationship, provide bilingual engineering support, coordinate logistics and compliance, and ensure that every hydrogen water generator, ozone gas generator, or process system performs at or above the specifications that were agreed upon during qualification.
Where Our Hydrogen and Ozone Systems Are Deployed
Our hydrogen water generators, hydrogen gas generators, ozone water systems, and ozone gas generators serve critical applications across semiconductor wafer fabrication, advanced packaging, display manufacturing, and precision industrial processing environments worldwide.
Semiconductor Wafer Cleaning
Dissolved hydrogen water and ozone water for pre-diffusion cleaning, post-etch residue removal, and megasonic-assisted particle removal across all wafer sizes including 200mm and 300mm semiconductor manufacturing processes.
Surface Oxidation and Passivation
Controlled ozone water treatment for thin chemical oxide growth and surface passivation layers that protect wafer surfaces during inter-step transfers and queue time management in semiconductor wet processing lines.
Photoresist Stripping and Organic Removal
High-concentration ozone water replaces sulfuric peroxide (SPM) mixtures for photoresist stripping in semiconductor fabs, reducing chemical consumption, hazardous waste generation, and total cost of ownership in wet bench operations.
Reducing Atmospheres and Annealing
High-purity hydrogen gas supply from our on-site hydrogen gas generators for forming gas annealing, ammonia-diluted hydrogen environments, and carrier gas applications in CVD and PVD processes requiring 99.999% H₂ purity.
Display and Photovoltaic Manufacturing
Ozone water systems and hydrogen water generators for flat panel display glass cleaning, thin film transistor processing, and solar cell wafer preparation where chemical-free functional water alternatives reduce environmental impact and chemical handling costs.
Medical and Sterilization Applications
Ozone gas generators for medical equipment sterilization, pharmaceutical water treatment, and high-purity process environments requiring validated microbial destruction without chemical residue or secondary contamination.
Built to Semiconductor Industry Standards
Every hydrogen water generator, hydrogen gas generator, ozone water system, and ozone gas generator supplied by Inquivix Technologies is designed, tested, and certified to meet the technical and regulatory standards required by semiconductor manufacturing facilities worldwide.
SEMI SECS/GEM Communication
All hydrogen and ozone systems support SEMI Equipment Communications Standard (SECS) and Generic Equipment Model (GEM) protocols, enabling automated process control, equipment status monitoring, and data collection through your existing semiconductor fab manufacturing execution system (MES).
CE and UL Safety Certification
Our hydrogen gas generators and ozone gas generators carry both CE marking for European compliance and UL listing for North American safety standards. Safety features include hydrogen gas leak detection with automatic emergency shutdown, internal pressure monitoring, and ventilation interlocks designed to protect personnel and cleanroom equipment in semiconductor manufacturing environments.
Ultrapure Water Compatibility
All wetted materials in our dissolved hydrogen water systems and ozone water systems are selected for ultrapure water (UPW) compatibility, including electropolished stainless steel, PTFE, PFA, and PVDF components. Systems are designed to maintain water resistivity above 18.2 megohm-cm and total organic carbon (TOC) levels below 5 ppb at the point of use, preserving the integrity of your UPW delivery infrastructure throughout the semiconductor fabrication process.
Process Integration Engineering
Beyond equipment supply, Inquivix Technologies provides P&ID review, utility requirement planning, electrical specification coordination, control interface design, and system integration consulting. We ensure that every hydrogen water generator or ozone gas generator is properly matched to your facility's electrical, mechanical, and process control infrastructure before procurement — reducing integration risk and commissioning time.
From Inquiry to Integration
Whether you are a semiconductor fab evaluating a hydrogen water generator for wafer cleaning, an equipment OEM looking for an ozone gas generator for tool integration, or an international technology company seeking Korean semiconductor market representation, our engagement process is structured for technical rigor and commercial clarity.
Technical Consultation
We start with your process requirements: flow rates, dissolved hydrogen or ozone concentrations, integration constraints, electrical specifications, safety requirements, and compliance needs. We do not issue premature quotations without complete technical alignment between your application and our system capabilities.
System Specification
Our engineering team configures the hydrogen or ozone system to match your exact process environment, including P&ID review, utility requirements, control interface specifications, and safety interlock design. For Korea market entry partners, this phase includes localization planning and regulatory assessment.
Proposal and Qualification
Inquivix Technologies delivers a detailed proposal with itemized system specifications, application-specific feature documentation, and technical support materials to support your internal business case and procurement approval process.
Delivery and Ongoing Support
From manufacturing coordination and international logistics to on-site installation support, system commissioning, and ongoing preventive maintenance, Inquivix Technologies manages the complete system lifecycle to ensure sustained performance and process stability.
Ready to Discuss Your Process Requirements?
From bilingual technical documentation and Korean regulatory certification to on-site system installation and fab-level performance validation, Inquivix Technologies manages the complete localization and qualification process. Our bilingual engineering team ensures every hydrogen generator, ozone system, or process tool meets Korean compliance standards and fab-specific performance requirements before it reaches the cleanroom floor. We handle import logistics, certification coordination, and technical demonstration support so your team can focus on the technology.